DETECTING SENSORS AND MEASURING MODULES OF PRESSURE SENSORS.
STANDARTIZATION AND UNIFICATION ISSUES 

Chernetsov Mikhail Andreevich, Postgraduate student, Penza State University of Technology (1a/11 Baydukova passage, Penza, Russia), mseqtor@gmail.com
Sokolov Aleksandr Vladimirovich, Postgraduate student, Penza State University of Technology (1a/11 Baydukova passage, Penza, Russia), sokolov_av_avto@ mail.ru 

621.372

Background. Object of research is the design of detecting elements (DE) and measuring modules (MM) of semiconducting pressure sensors.Subject of research is the processes of optimization and unification of range of items of DE and MM of physical quantity sensors (PQS). The work is aimed at reducing the cost of PQS without decreasing technical characteristics and reliability index thereof.
Results. The authors developed structurally and functionally complete standardized DE and MM of static and dynamic pressure sensors. The cost of sensors produced on the basis of standardized DE and MM was analyzed. Conclusions. Comparison of two methods of PQS production (the traditional one, using the full cycle pf production, and the suggested one, using the purchased structurally and functionally complete DE and MM) showed the sensors produced via the second method are 1,5–2 times cheaper than via the first one. 

detecting elements, measuring modules, pressure sensors, standardization. 

1. RMG 29-99 Rekomendatsii po mezhgosudarstvennoy standartizatsii. Gosudarstvennaya sistema obespecheniya edinstva izmereniya. Metrologiya. Osnovnye terminy i oprdeleniya [Recommendations on interstate standardization. State system of measurements uniformity provision. Metrology. Basic terms and definitions]. Minsk: IPK Izdatel'stvo standartov, 2000.
2. A. s. SSSR 1527526. Integral'nyy poluprovodnikovyy preobrazovatel' davleniya [Integral semi-conducting pressure transducer]. Mikhaylov P. G., Kozin S. A. BI no. 45, 1989.
3. Mikhaylov P. G., Varlamov A. V. Datchiki i sistemy [Sensors and systems]. 2007, no. 8, pp. 23–26.
4. Mikhaylov P. G., Mokrov E. A. Elektronnye komponenty [Electronic components]. 2006, no. 5, pp. 12–15.
5. Kozin S. A., Barinov I. N. Komponenty i tekhnologii [Components and technologies]. 2010, no. 1, pp. 24–25.
6. Belozubov E. M., Belozubova N. E., Vasil'ev V. A. Nano- i mikrosistemnaya tekhnika [Nano- and microsystem technology]. 2009, no. 2, pp. 33–39.
7. Mikhaylov P. G. Pribory i Sistemy. Upravlenie. Kontrol'. Diagnostika. [Devices and Systems. Management. Control. Diagnostics]. 2003, no. 11, pp. 29–31.